DIGITAL HOLOGRAPHY MEASURING DEVICE AND METHOD

摘要

PROBLEM TO BE SOLVED: To provide a digital holography measuring device capable of measuring accurately a measuring object group having high density. SOLUTION: In this digital holography measuring device for measuring a physical quantity of the fine measuring object in a three-dimensional space by using digital hologram image reproduction, while irradiating a hologram image generated by an imaging means equipped with an imaging face vertical to the irradiation direction of the reproduction light from a light source with reproduction light numerically, a light amplitude distribution on each reproduction surface on each different position in the depth direction vertical to the hologram image is calculated, and a phase of each calculated light amplitude distribution is calculated as a relative phase to a reference phase on each reproduction surface, and the physical quantity of the measuring object is measured based on each calculated relative phase. COPYRIGHT: (C)2008,JPO&INPIT