| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor analyzer capable of quickly detecting a failure of a semiconductor device to be measured with high sensitivity. SOLUTION: The semiconductor analyzer has a power supply which supplies a power supply voltage to the semiconductor device to be measured, and a laser scanning part, which emits a laser light beam on the main face of the semiconductor device while scanning, so as to analyze the failure part of the semiconductor device by detecting changes of a current flowing in the semiconductor device due to irradiation of the laser light beam. It is provided with a superposition for superposing a ripple on the power supply voltage supplied from the power supply to the semiconductor device. COPYRIGHT: (C)2008,JPO&INPIT
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