| 摘要 |
PROBLEM TO BE SOLVED: To provide an anisotropic conductive sheet having no contamination and excellent reliability in electrical connection by using an electrical insulating porous material, and its efficient manufacturing method having a small number of production processes. SOLUTION: In this manufacturing method of the anisotropic conductive sheet, after a mask sheet having an opening is superimposed over at least one side of a porous sheet, the sputtering or vapor deposition of a conductive material is applied to the open side of the mask sheet, and a conductive columnar body is thereby formed in the thickness direction of only a portion of the porous sheet corresponding to the opening. In addition, in this anisotropic conductive sheet, the conductive columnar body obtained by sputtering and vapor deposition is formed in the thickness direction of a polyfluorocarbon fiber sheet. COPYRIGHT: (C)2008,JPO&INPIT
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