| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate positioning method and device capable of shortening the time for positioning a substrate even if the size thereof may vary. <P>SOLUTION: In the substrate positioning method, when a front end position in the conveyance direction of a substrate that is conveyed on a substrate processing device is detected by a first substrate sensor, the speed of carrier rollers is reduced, and the substrate is stopped such that a position detection mark provided on the substrate is located near a stop reference position. The position detection mark is imaged by a camera and the amount of deviation between the stop reference position and an actual stop position is detected, and then the position of the substrate is corrected. A stopper is provided in a downstream side of the conveyance direction. The substrate sensor, stopper, and camera are previously disposed such that the three positions of the stop reference position, a position separated by L1, and a position separated by L2 are all positioned within the vision of the camera. L1 is a distance between the position of the position detection mark, when the front end position in the conveyance direction of the substrate is detected by the first substrate sensor, and the stop reference position. L2 is the distance between the position of the position detection mark, when the substrate abuts the stopper, and the stop reference position. <P>COPYRIGHT: (C)2008,JPO&INPIT |
