| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic detector which includes a magnetic generation coil which is small, has flexibility in the arrangement of an MI element, and is suitable for mass production. SOLUTION: The magnetic detector 1 comprises a lower IC chip 2 having a wire 32 and an Al electrode 21 on its one surface, an upper IC chip 4 having a wire 31 on its one surface, the MI element 5 in which a highly magnetic permeable film is formed on a Si substrate, and a connecting terminal 33 for connecting the wire 31 and the wire 32 electrically. A magnetic-field generation section 3 having a spiral structure with a spiral central axis 35 as an axis by arranging the lower IC chip 2 and the upper IC chip 4 face-to-face and connecting the exposed parts of the wire 31 and the wire 32 with the connecting terminal 33. The magnetic-field generation section 3 is formed in the surface parallel direction to the lower IC chip 2 and the upper IC chip 4, that is, in the parallel direction to a surface having its normal in the z-axis direction, is provided with the MI element 5 in its center, and is arranged so that the spiral central axis 35 is coincident with the magnetic reaction direction of the MI element 5. COPYRIGHT: (C)2008,JPO&INPIT
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