| 摘要 |
PROBLEM TO BE SOLVED: To provide a device evaluation apparatus and method, capable of testing durability of a device which is used in a higher temperature region in comparison with conventional one. SOLUTION: The evaluation apparatus 30 includes: electronic cooling elements (i.e., a first Peltier element 9 and a second Peltier element 31); a heater 8; heat radiating members (i.e., a radiator 11, a refrigerant channel 13, a heat exchanger 15, a pump 14 and a refrigerant 17); and a controller 29. The electronic cooling elements are connected thermally to an object to be measured 1 including a semiconductor device. The heater 8 is connected thermally to the object to be measured 1. The heat radiating members are connected thermally to the electronic cooling elements. The controller 29 controls an electric power which is applied to the heater 8 and the electronic elements. COPYRIGHT: (C)2008,JPO&INPIT
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