发明名称 Gas-sensitive field-effect transistor for the detection of hydrogen sulfide
摘要 A gas-sensitive field-effect transistor (GasFET) for the detection or measurement of an amount of hydrogen sulfide present in ambient air includes a raised gate electrode and a transistor structure. The raised gate electrode may be formed from or coated with a gas-sensitive material such as tin oxide, or silver, silver oxide or mixtures thereof. An insulator layer may be disposed on top of the transistor structure. An air gap is formed between the gas-sensitive layer of the raised gate electrode and the insulator layer on top of the transistor structure.
申请公布号 US2007235773(A1) 申请公布日期 2007.10.11
申请号 US20060396276 申请日期 2006.03.31
申请人 发明人 EISELE IGNAZ;FLEISCHER MAXIMILIAN;FREITAG GUNTER;KNITTEL THORSTEN;LAMPE UWE;MEIXNER HANS;POHLE ROLAND;SIMON ELFRIEDE
分类号 H01L23/58 主分类号 H01L23/58
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