| 摘要 |
A device and a method for measuring discharging uniformity of a slit nozzle in the width direction are provided to detect evenness in the width direction of a photoresist, which formed on a substrate by the slit nozzle, simply and accurately. A device for measuring discharging uniformity of a slit nozzle in the width direction comprises a plurality of hydraulic pressure measuring units(320) and a control unit(360). The plural hydraulic pressure measuring units are formed with a hydraulic pressure detecting surface(320f) corresponding to a discharge port(112) of the slit nozzle, and arranged in parallel to the width direction of the slit nozzle(110) to measure discharging pressure of fluid at the discharge port. The control unit is installed to count the measured discharging pressure and to compute and display the uniformity.
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