CALIBRATION METHOD FOR ROBOT FOR USE IN SEMICONDUCTOR DEVICE FABRICATING

摘要

A calibration method for a robot used for fabricating a semiconductor device is provided to prevent or minimize an error of a wafer process by raising an alarm when input data are out of a limited value. A calibration method for a robot used for fabricating a semiconductor device includes the steps of: inputting a calibration value for each position on a guide screen of software(S20); setting a limited value for each item(S22); inputting calibration data into the robot; determining whether the input data are out of the limited value(S24); proceeding the following process if the input data are within the limited value(S28); and alarming if the input data are out of the limited value(S26).