发明名称 Patterns of conductive objects on a substrate and method of producing thereof
摘要 <p>A method for manufacturing a pattern of conductive elements on a substrate is provided. The method includes depositing in a vacuum deposition chamber an electrically conductive material onto the substrate to form a base layer. Then, the method includes selectively applying an electric insulating agent on selective areas of the base layer. Then, areas of the base layer that are not covered with the insulating material are electroplated with a second electrically conductive layer. The electric insulating agent is then removed from the substrate and the base layer is chemically etched thus removing the base layer that was covered with the insulating material and selectively exposing the substrate to create the pattern of conductive objects on the substrate.</p>
申请公布号 EP1843383(A2) 申请公布日期 2007.10.10
申请号 EP20070251477 申请日期 2007.04.03
申请人 HANITA COATINGS R.C.A. LTD 发明人 WOLLACH, GAL;CARMI, YOASH;EISENSTADT, DANY
分类号 H01L21/00;C23C18/16 主分类号 H01L21/00
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