摘要 |
Especially for use in the semiconductor industry, a displacement device (701) is disclosed comprising a first part comprising a carrier (714) on which a system of magnets (710) is arranged according to a pattern of row and columns extending parallel to the X-direction and the Y-direction, respectively. The magnets in each row and column are arranged according to a Halbach array, i.e. the magnetic orientation of successive magnets in each row and each column rotates 90� counter-clockwise. The second part comprises an electric coil system (712) with two types of electric coils, one type having an angular offset of +45�, and the other type having an offset of−45� with respect to the X-direction. The first part (714, 710) is movable over a range of centimeters or more with respect to the stationary second part (712). For high precision positioning of the first part, an interferometer system (731, 730) is provided. |
申请人 |
KONINKLIJKE PHILIPS ELECTRONICS N.V. |
发明人 |
COMPTER, JOHAN, C.;FRISSEN, PETRUS, C., M.;VAN EIJK, JAN |