METHOD AND APPARATUS FOR VHF PLASMA PROCESSING WITH LOAD MISMATCH RELIABILITY AND STABILITY,申请号KR20047018698-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR VHF PLASMA PROCESSING WITH LOAD MISMATCH RELIABILITY AND STABILITY
摘要
申请公布号	KR100766162(B1)	申请公布日期	2007.10.10
申请号	KR20047018698	申请日期	2004.11.19
申请人		发明人
分类号	H05H1/00;H01J37/32;H05H1/18;H05H1/46	主分类号	H05H1/00
代理机构		代理人
主权项
地址

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