| 摘要 |
A multiple function thin film resistor-capacitor array and a method for manufacturing the same are provided to form resistors with different resistances and capacitors with different capacitances or the combination thereof by controlling the pattern and thickness of a dielectric film, to reduce fabrication costs, and to reduce die bonding time. A dielectric thin film is formed on a silicon substrate. A metallic array layer is formed on the dielectric thin film. The metallic array layer has resistors(23) with different resistances and capacitors(24,25) with different capacitances. The resistors and capacitors are formed by performing a photolithography process using a photomask. A circuit connection is formed between the metallic array layer and the dielectric thin film. A grinding process is performed on the silicon substrate in order to obtain an aiming thickness from the resultant structure.
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