发明名称 |
HOLOGRAM AND METHOD OF MANUFACTURING AN OPTICAL ELEMENT USING A HOLOGRAM |
摘要 |
A method of manufacturing an optical element (5) comprises testing an optical surface (3) of the optical element, using an interferometer 1a directing measuring light (23a) onto the optical surface wherein the measuring light traverses two successive holograms (44, 48) disposed in the beam path of the measuring light upstream of the optical surface. |
申请公布号 |
EP1842027(A2) |
申请公布日期 |
2007.10.10 |
申请号 |
EP20060703920 |
申请日期 |
2006.01.20 |
申请人 |
CARL ZEISS SMT AG |
发明人 |
HETZLER, JOCHEN;BEDER, SUSANNE;FELDMANN, HEIKO |
分类号 |
G01B9/021;G01B11/24 |
主分类号 |
G01B9/021 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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