| 发明名称 |
Cooling agent for treating and producing wafers |
| 摘要 |
<p>Coolant for preparing and/or treating ingots and/or wafers, comprises at least a surfactant. An independent claim is included for a process for preparing and/or treating ingots and/or wafers comprising using the coolant.</p> |
| 申请公布号 |
EP1842899(A1) |
申请公布日期 |
2007.10.10 |
| 申请号 |
EP20070005527 |
申请日期 |
2007.03.17 |
| 申请人 |
EVONIK GOLDSCHMIDT GMBH |
发明人 |
WEYERSHAUSEN, BERND DR.;HENNISSEN, LOUIS DR. |
| 分类号 |
C10M173/02 |
主分类号 |
C10M173/02 |
| 代理机构 |
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代理人 |
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| 地址 |
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