发明名称 EVAPORATING DEVICE FOR THE SUBLIMATED MATERIALS
摘要 FIELD: chemical industry; mechanical engineering; production of the evaporating devices for the vacuum deposition. ^ SUBSTANCE: the invention is pertaining to the evaporating device intended, first of all, for the installations of the vacuum deposition. The evaporating device has the bath (3) for an evaporated material and the heating device with the current-carrying heating bars (5) located above the bath (3). The bath (3) has the cover (8) with the outlet slit (16) for the evaporated material. The heating bars (5) are placed in the space between the cover (8) and the bath (3). At the ridge of the cover (8) under the slit (16) there is the mounted perforated partition (18) transparent for the formed vapors passing through, but preventing the material particles passing through into the thermal deposition chamber (1). The design of the device is rather simple, the device can be easily disassembled for cleaning and also similarly simply assembled, and at the in series mounting of several such devices they may be used for the uniform coating of the very different films. ^ EFFECT: the invention ensures, that the evaporating device design is rather simple, may be easily disassembled for cleaning and also easily assembled, at usage of several such devices in series they may be used for deposition of the uniform coatings on the very different films. ^ 7 cl, 3 dwg
申请公布号 RU2307877(C2) 申请公布日期 2007.10.10
申请号 RU20040137526 申请日期 2004.12.22
申请人 EHPPLAJD MATIRIALZ GMBKH EHND KO.KG 发明人 KLEMM GJUNTER;GERTSOG JENS;D-R LOTTS GANS-GEORG
分类号 C23C14/24;C23C14/26;C23C14/28 主分类号 C23C14/24
代理机构 代理人
主权项
地址