APPARATUS FOR TRANSFERRING SUBSTRATE

摘要

An apparatus for transferring a substrate is provided to prevent a scratch by removing connection elements on an upper surface of a module contacting with the substrate. An apparatus for transferring a substrate comprises an upper body(30) with multiple air injection holes in one side to an associated transferring substrate, a lower body(40) which is connected to the upper body and forms a predetermined air flowing space between the lower body and the upper body, and a module(20) having a fan for generating air to the air injection hole. The connection area between the upper body and the lower body is installed in a lower area of the air injection hole.