Process for improving the adhesive properties of a ceramic substrate

摘要

Improving adhesion properties of non-oxide ceramic substrate (1) before gluing involves irradiating ceramic substrate surface with excimer laser to modify the chemical bonds and applying a coupling agent to the irradiated surface to form chemical bond between coupling agent and oxidized surface resulting from irradiation of the ceramic substrate. Improving adhesion properties of non-oxide ceramic substrate (1) before gluing involves irradiating ceramic substrate surface with excimer laser to modify the chemical bonds and applying a coupling agent to the irradiated surface to form chemical bond between coupling agent and oxidized surface resulting from irradiation of the ceramic substrate. The laser is a krypton fluoride excimer laser emitting at 248 nm or argon fluoride excimer laser emitting at 193 nm. The substrate is made of aluminum nitride, silicon carbide or silicon nitride. The coupling agent is an aqueous silane solution. Independent claims are included for the following: (1) method of assembly by gluing non-oxide ceramic substrate to cooling liquid manifold (5) using a modified epoxy resin; and (2) power module.