| 摘要 |
A substrate holding device has a base member which removably holds a plate having a contact member to come into contact with a substrate, a first attraction mechanism which attracts the substrate onto the plate, and a second attraction mechanism which attracts the plate onto the base member. In this arrangement, as the plate can be removed, time to remove contaminants is not required, and productivity can be improved. Further, as the plate on a flat plate can be attached/removed, plate exchange can be easily made.
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