发明名称 |
Automated processing system |
摘要 |
An automated processing system has an indexer bay perpendicularly aligned with a process bay within a clean air enclosure. An indexer in the indexer bay provides stocking or storage for work in progress wafers or articles. Process chambers are located in the process bay. A transfer robot moves wafers from a pod unsealed at a docking station into a carrier at a transfer station. The carrier has tapered or stepped outside surfaces engaging corresponding inside surfaces on a rotor within a process chamber. A process robot moves between the indexer bay and process bay to carry wafers to and from the process chambers. The process robot has a robot arm vertically moveable along a lift rail. Wafers are carried offset from the robot arm, to better avoid contamination. The automated system is compact and requires less clean room floor space.
|
申请公布号 |
US7278813(B2) |
申请公布日期 |
2007.10.09 |
申请号 |
US20020334688 |
申请日期 |
2002.12.30 |
申请人 |
SEMITOOL, INC. |
发明人 |
DAVIS JEFFRY A.;NELSON GORDON RAY;BEXTEN DANIEL P. |
分类号 |
B65D85/86;B65G49/07;H01L21/027;H01L21/673;H01L21/677;H01L21/687 |
主分类号 |
B65D85/86 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|