发明名称 |
Piezoelectric resonator element, piezoelectric device, method of manufacturing the same, cellular phone device utilizing piezoelectric device, and electronic equipment utilizing piezoelectric device |
摘要 |
A piezoelectric resonator element is provided including a base portion and a plurality of resonating arms extending from the base portion. A notch part is formed in the base portion. Grooves are formed in the front and back surfaces of the resonating arms. A driving electrode is provided at least in the grooves of the resonating arms. The driving electrode has a lower layer and an electrode layer formed on the lower layer. The thickness t of the lower layer is in the range 0.07<t<0.3 micrometers.
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申请公布号 |
US7279824(B2) |
申请公布日期 |
2007.10.09 |
申请号 |
US20040976246 |
申请日期 |
2004.10.27 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
TANAYA HIDEO;JOKURA TOSHINARI;OSHIRO ATSUSHI |
分类号 |
H01L41/08;H01L41/09;H01L41/18;H01L41/22;H03H3/02;H03H9/19;H03H9/21;H03H9/215 |
主分类号 |
H01L41/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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