发明名称 Process for forming a redundant structure
摘要 Device and method of fabricating device. The device includes a dual damascene line having a metal line and a via, and a redundant liner arranged to divide the metal line. The method includes forming a trench in a metal stripe of a dual damascene line, depositing a barrier layer in the trench, and filling a remainder of the trench with metal.
申请公布号 US7279411(B2) 申请公布日期 2007.10.09
申请号 US20050164223 申请日期 2005.11.15
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 AGARWALA BIRENDRA N.;NGUYEN DU BINH;RATHORE HAZARA SINGH
分类号 H01L21/4763 主分类号 H01L21/4763
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