发明名称 Fabricating method for flexible thin film transistor array substrate
摘要 A method of fabricating a flexible thin film transistor array substrate is provided. First, a rigid substrate is provided, and a polymer material layer is coated on the rigid substrate. Then, an insulating layer is coated over the polymer material layer by a spin coating process. The insulating layer covers the sides of the polymer material layer. Thereafter, a thin film transistor array is formed over the insulating layer. Then, the polymer material layer having the thin film transistor array is separated from the rigid substrate.
申请公布号 US7279401(B2) 申请公布日期 2007.10.09
申请号 US20060306564 申请日期 2006.01.03
申请人 INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE 发明人 WONG TE-CHI;WU JIAN-SHU;TYAN HORNG-LONG;LEU CHYI-MING
分类号 H01L21/30;H01L21/46 主分类号 H01L21/30
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