发明名称 Block contact architectures for nanoscale channel transistors
摘要 A contact architecture for nanoscale channel devices having contact structures coupling to and extending between source or drain regions of a device having a plurality of parallel semiconductor bodies. The contact structures being able to contact parallel semiconductor bodies having sub-lithographic pitch.
申请公布号 US7279375(B2) 申请公布日期 2007.10.09
申请号 US20050173866 申请日期 2005.06.30
申请人 INTEL CORPORATION 发明人 RADOSAVLJEVIC MARKO;MAJUMDAR AMLAN;DOYLE BRIAN S.;KAVALIEROS JACK;DOCZY MARK L.;BRASK JUSTIN K.;SHAH UDAY;DATTA SUMAN;CHAU ROBERT S.
分类号 H01L21/336 主分类号 H01L21/336
代理机构 代理人
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