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发明名称
method for manufacturing semiconductor device
摘要
申请公布号
KR100762844(B1)
申请公布日期
2007.10.08
申请号
KR20010083292
申请日期
2001.12.22
申请人
发明人
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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