| 摘要 |
<p>A laser direct-patterning apparatus having a polygon mirror is provided to easily carry out the patterning operation by directly scanning a pattern on a glass substrate using the polygon mirror. A polygon mirror(103) has plural reflective surfaces for reflecting light emitted from a light source(100). Optical units(105,106) guide the light reflected from the reflective surface of the polygon mirror onto a substrate(10). A stage(130) moves the substrate in a main scanning direction of the light and a subscanning direction perpendicular to the main scanning direction. Light path recognizing units(108,109) recognize the path of the light reflected by the reflective surface. The light path recognizing unit has a first light receiving portion(108) for receiving the light having an initial light path and a second light receiving portion(109) for receiving the light having last light path.</p> |
