| 摘要 |
A surface inspection device is provided to decrease a defective rate of finished products and to increase productivity thereof by preventing a shinny spot from being detected as a defect. A surface inspection device comprises a first illumination unit(110), a second illumination unit(120), an image pickup unit(70), an image control unit, and a control unit. The first illumination unit radiates light at a radiation angle(theta1) to a normal line(P) of a line(L) in the moving direction of an inspection object. The second illumination unit radiates light at a radiation angle(theta2) less than the radiation angle of the first illumination unit. The image pick-up unit is mounted to photograph the line. The image control unit displays the line image on a display unit. The control unit controls lighting of the first and second illumination units and handles the image pick-up unit and the image control unit. The light of the second illumination unit only is transmitted to the image pickup unit when there is a shinny spot reflecting the light on the line(L).
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