| 摘要 |
A movable probe unit and an inspection device thereof are provided to perform easily a position aligning process of a contact member on a plate to be tested by easily aligning a probe block on a predetermined position. Main bases(22) are arranged at both sides of a plate to be tested and support the plate to be tested. A data signal-side base(23) supports a probe block. A complex cross link(24) supports the data signal-side base at an arbitrary position, while supported by the main base. A gate signal-side base(25) is arranged to be normal to the data signal-side base and supports the probe block, while slidably supported by the main bases. Linear guides(26) are implemented on the gate and data signal-side bases, and slidably support the probe block. A position determining jig(27) fixes the data and gate signal-side bases at predetermined positions, respectively. A probe block position fixing jig supports the probe blocks at predetermined positions at the same time.
|
