ROBOT FOR TRANSFERRING WAFER

摘要

A robot for transferring a semiconductor wafer is provided to form uniform vacuum in vacuum pads and to reduce a manufacturing cost by reducing the number of vacuum pads. A holder(30) is coupled with the end of one side of a lifter shaft(10) which is moved in a predetermined direction. A plurality of push pins(40) are coupled with a lower end of the holder. A vacuum line is formed inside the holder in order to supply a vacuum. A vacuum pad(60) is coupled with the lower end of the holder on the inner side in comparison with the positions of the push pins. The vacuum pad is connected to the vacuum line in order to absorb a wafer in a vacuum state. The vacuum pad is protruded from the lower end of the holder at the end of each vacuum line extended from a center of the holder in a radial direction.