| 摘要 |
A stage mechanism capable of preventing the smooth driving of linear guides from being obstructed due to its thermal expansion. The stage mechanism comprises at least one table (4, 5), the pair of linear guides (11, 12, 21, 22) for the tables guiding the tables in a linear direction, and linear guides (13, 23) for compensation compensating the displacement of the tables due to their thermal expansion. The one linear guides (11, 12, 21, 22) for the tables are fixed to a support part and the table, and the other linear guides (11, 21) for the tables are so formed that the tables can be moved in a direction orthogonal to the linear direction by the linear guides (13, 14, 15, 23) for compensation. Or the other linear guides for the tables are formed to be movable relative to the support part in the direction orthogonal to the linear direction by the linear guides (13, 23) for compensation.
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