| 摘要 |
A Faraday cup assembly of an ion implanter is provided to reduce a manufacturing error by easily inspecting a damage to an insulation member. A Faraday cup assembly of an ion implanter includes a Faraday cup(210), a cover(220), a bias plate(230), an insulation member(240), and an alarm unit(280). The Faraday cup detects an amount of ions. The cover encloses the Faraday cup. The bias plate is arranged at an inlet of the Faraday cup and suppresses emission of electrons, which are generated by a collision between the bias plate and the Faraday cup. The insulation member is arranged between the cover and the bias plate and insulates the Faraday cup, the cover, and the bias plate. The alarm unit is arranged on the insulation member and notifies a damage to the insulation member.
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