| 摘要 |
A panel grinding apparatus is provided to prevent a panel from being damaged by the high static electricity generated during panel grinding process. A panel grinding apparatus includes a stage(115) on which a panel(111) is mounted, a grinding unit for grinding the panel, and a pair of grippers(117a,117b) for gripping and moving the panel from the stage. The grippers have ground terminals(121). The stage has a plurality of suction holes for sucking the panel. The ground terminals are made of a metal material of copper alloy or stainless steel. |
