| 摘要 |
A vacuum valve is provided to achieve efficient transfer of force by using high sealing force obtained through a driving piston installed in a valve plate. A vacuum valve comprises a valve housing(1), a valve plate(6) and a driving device. The valve housing(1) comprises an inlet(2), an outlet(3) and a valve sheet(13) surrounding the inlet(2). The valve plate(6) is located in the inner space(10) of the valve housing(1) and is rigidly connected to a pivotable support arm(7). The driving device comprises a driving piston(20) provided at the inner hollow space(19) of the valve plate(6). The inlet (2) and the outlet(3) have a circular shape and are coaxially located. The valve plate(6) has a circular shape when viewed in the axial direction of the inlet(2). The driving piston(20) has a circular shape when viewed in the axial direction of the outlet(3).
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