LASER MACHINING APPARATUS AND WINDOW CELL

摘要

A laser processing device and a window cell are provided to decrease cleaning time as the window cell is not required to be separated and to prevent damage to the window cell when handling the window cell. A laser processing device comprises a window cell(20) and a cleaning unit(A). The window cell is positioned at a side of a process material(8) for a light collecting lens(7). The cleaning unit is positioned at an XY table(9) to clean the surface of the window cell. The cleaning unit is formed at the position spaced from the window cell to process the process material by a laser beam. The cleaning unit is contacted with the window cell to clean the window cell. A base material of the window cell is germanium, and the surface of the window cell facing the process material is DLC(diamond-like-carbon)-coated.