COLD CATHODE ELECTRON GUN USING AN ELECTRON AMPLIFICATION BY SECONDARY ELECTRON EMISSION, AND E-BEAM GENERATION METHOD THEREOF

摘要

A cold cathode electron gun and an electron beam generation method thereof are provided to emit a stable electron beam with a high current density by using an electron amplification due to a secondary electron emission phenomenon. A cold cathode electron gun includes an electron source, a first grid(20), an aperture(30), and a second grid(40). The electron source emits primary electrons. The first grid focuses and accelerates the electron beam from the electron source. The aperture accelerates the electron beam. The second grid generates secondary electrons by using collisions among some of the electron beams from the aperture. The second grid emits the electron beam containing primary and secondary electrons to the outside. The electron beam is controlled by using a DC source.