MANUFACTURING METHOD OF CRYSTAL RESONATOR AND CRYSTAL RESONATOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a crystal resonator wherein a side etching is hardly in progress from a boundary face of joined crystal wafers.

SOLUTION: The manufacturing method of the crystal resonator includes: a joining step of joining a first flat plate crystal wafer (10a) with a second flat plate crystal wafer (10b) to form a flat plate joined crystal wafer (10); a protection film forming step for forming a protection film (114) to a circumferential edge part (10e) of the joined crystal wafer; and a wet etching step of applying wet etching to the joined crystal wafer (10) after the protection film forming step.

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