发明名称 ROTARY VACUUM FEEDTHROUGH FOR ROTATABLE MAGNETRONS
摘要 The present invention concerns a cathode arrangement, preferably for a magnetron cathode, especially for operation in the case of medium-to-high frequency alternating voltage or currents with a rotatable cathode, of which at least one part is arranged rotatably and vacuum-tight in at least one fixed component, and an insert, which is provided between the rotatable part and fixed component(s), with the insert made from an isolator.
申请公布号 US2007227881(A1) 申请公布日期 2007.10.04
申请号 US20070692710 申请日期 2007.03.28
申请人 APPLIED MATERIALS GMBH & CO. KG 发明人 GAERTNER HARALD;SAUER ANDREAS
分类号 C23C14/00 主分类号 C23C14/00
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