| 摘要 |
This invention relates to processes for the production of organometallic compounds represented by the formula H3AhL n wherein L is one or more Lewis bases capable of providing an unshared electron pair to the aluminum and n is 1 or 2, which comprise (a) forming a first solution of an alkali metal aluminum hydride ' and a Lewis base in an ethereal solvent, (b) adding to said first solution an aluminum halide in an ethereal solvent under reaction conditions sufficient to produce a second solution comprising said organometallic compound, and (c) separating said organometallic compound from said second solution. The organometallic compounds are useful in semiconductor applications as chemical vapor or atomic layer deposition precursors for film depositions. |
