| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sensor that is more rigid and maintains rigidity and stability, particularly in a broader temperature range, oscillation stress, and gravity load. <P>SOLUTION: A substrate that supports an MEMS device is provided. The substrate includes an accommodating container having an integrally formed pedestal mount that supports the MEMS device when used. The substrate can be combined with the MEMS device to form the sensor. <P>COPYRIGHT: (C)2008,JPO&INPIT |
