| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent a reflection prevention structure provided with fine irregularity of a cross section shape by optimizing the cross section shape of the fine irregularity and further improving an optical reflection prevention function in the reflection prevention structure forming the fine irregularity at a shorter pitch than the wavelength of light, and to provide its manufacturing method. <P>SOLUTION: The reflection prevention fine structure arranging numberless fine conical projections P having a polygonal or substantially circular bottom face at the shorter pitch than the wavelength of the visible optical beam makes a right angle to the bottom face of the conical projection P. Also, a degree n of a linear formula, X=(D/2)×ä1-(Z/H)<SP>n</SP>} or Z=äH/(D/2)<SP>n</SP>}×X<SP>n</SP>, expressing the shape of a line (ridgeline) connecting an apex and a bottom in a cross section including the apex of the projection exceeds 1 and is less than 3. <P>COPYRIGHT: (C)2008,JPO&INPIT |
