| 摘要 |
PROBLEM TO BE SOLVED: To provide a test piece holder in which the reattachment of particles to a test piece or the like does not occur in wiping-off work. SOLUTION: A test piece holder is provided on a principal plane of a ceramic substrate, and provided with a plurality of pins 1 for holding a test piece and a sealing part for forming a space to seal a gap in the test piece to be held at the outer edge part of the principal plane on the upper part side of the ceramic substrate. The pin 1 is tapered toward the tip, and is provided with at least one shoulder part 4 comprising a plurality of inclined surfaces 6 over the outer periphery. COPYRIGHT: (C)2008,JPO&INPIT |
