| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck capable of stabilizing in electric resistivity and coping with both of attracting and releasing characteristics in a high degree, in the electrostatic chuck provided with embedded electrodes in a ceramics substrate containing samarium-aluminum oxide phase, and to provide its manufacturing method. SOLUTION: The electrostatic chuck 1 is provided with the substrate 3 consisting of a sintered body of aluminum nitride containing samarium, and electrodes 17 embedded into the substrate and containing molybdenum. A part from the electrodes 17 to the surface 7 of the substrate in the substrate 3 is formed in a dielectric layer 21, and the surface 7 of the substrate is constituted so as to be a substrate disposing surface for attracting and disposing a work. In this case, the content of samarium-aluminum oxide phase in the part of the substrate near the electrodes 17 is specified so as to be not more than 2.5% in an area ratio. COPYRIGHT: (C)2008,JPO&INPIT |
