| 摘要 |
PROBLEM TO BE SOLVED: To provide a heating apparatus capable of effectively preventing occurrence of arcing by suppressing electric charges from being left to a ceramic base and a ring shaped member. SOLUTION: The heating apparatus is provided with: an insulation ceramics base 11 including a heating face 11a for heating an object to be heated; high frequency electrodes 13 embedded in the vicinity of the heating face 11a of the insulation ceramics base 11; resistance heaters 12 arranged to the insulation ceramics base 11 apart from the heating face more than the high frequency electrodes 13; and a low resistance ceramics member 16 exposed to part of the heating face 11a of the insulation ceramics base 11 and connected to the high frequency electrodes 13 as conductive members provided in the heating face 11a of the insulation ceramics base 11. COPYRIGHT: (C)2008,JPO&INPIT |
