| 摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration sensor that can reduce the variation of the characteristic of resistance value variation, depending on the shape, resistance value, and the temperature variation of a piezoresistor, and can improve the detection accuracy. SOLUTION: The acceleration sensor comprises a fixed section 1, first and second cantilever sections 2 and 3 connected to the fixed section 1, first and second weight sections 4 and 5 formed at respective tips of the first and second cantilever sections 2 and 3, and first to fourth piezoresistors 6-9 formed in the first and second cantilever sections 2 and 3, respectively. The first and second cantilever sections 2 and 3 and first and second weight sections 4 and 5 have the same shape and are arranged, pointing in the same direction on the same plane. COPYRIGHT: (C)2008,JPO&INPIT
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