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发明名称
Composition and method for recycling semiconductor wafers having low-k dielectric materials thereon
摘要
申请公布号
AU2006340825(A1)
申请公布日期
2007.10.04
申请号
AU20060340825
申请日期
2006.11.09
申请人
ADVANCED TECHNOLOGY MATERIALS, INC.
发明人
PAMELA M. VISINTIN;MACKENZIE KING;PING JIANG;MICHAEL B. KORZENSKI
分类号
H01L21/302;H01L21/461
主分类号
H01L21/302
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