| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator in which blockage factors of vibration can be removed by suppressing increase in CI value as a quartz vibrator, and to provide its fabrication process. SOLUTION: Since an electrode 12 in a region 20 of a crystal vibration chip 1 has the structure of the crystal vibration chip 1 where a third metal layer 12c exhibiting good adhesion to an insulating protective film 19 is formed on a second metal layer consisting of a first metal layer 12a and a noble metal, and then the insulating protective film 19 is formed on the third metal layer 12c, the insulating protective film 19 is formed rigidly and a piezoelectric vibrator having a good CI value can be obtained. COPYRIGHT: (C)2008,JPO&INPIT
|
