| 摘要 |
PROBLEM TO BE SOLVED: To provide an ionization device allowing the type of an ionization chamber mounted in a vacuum vessel to be determined without releasing vacuum. SOLUTION: This ionization device includes the vacuum vessel 11, and a filament 12 and a trap electrode 13 arranged in the vacuum vessel 11, and used for ionizing sample gas by directly or indirectly using thermoelectrons in the ionization chamber mounted in the vacuum vessel 11. The ionization device is provided with: a first ammeter 16 for measuring a flowing current I<SB>1</SB>by thermoelectrons generated from the filament 12 and having reached the trap electrode 13 after passing through the ionization chamber; a second ammeter 17 for measuring a flowing current I<SB>2</SB>by thermoelectrons having collided with a wall surface of the ionization chamber; and an ionization chamber determination part 19 for determining the type of the ionization chamber mounted in the vacuum vessel 11 based on the ratio of I<SB>1</SB>to I<SB>2</SB>. COPYRIGHT: (C)2008,JPO&INPIT
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