| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic disk having suitable wear resistance and sliding characteristics even when a protective layer has≤3 nm film thickness and suitable for an LUL system. SOLUTION: In a manufacturing method of the magnetic disk provided with at least: a substrate 1; a magnetic layer 3 film-deposited on the substrate 1 for performing magnetic recording; and the protective layer 4 film-deposited on the magnetic layer 3 for protecting the magnetic layer 3, the protective layer 4 has a hydrocarbon protective film 4a composed substantially of carbon and hydrogen on the magnetic layer 3 side. The manufacturing method of the magnetic disk includes a hydrocarbon protective film depositing step of depositing the hydrocarbon protective film 4a in an atmosphere of 0.1 to 2 Pa degree of vacuum while performing plasma ignition using an igniter for securing stable plasma discharge. COPYRIGHT: (C)2008,JPO&INPIT
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