| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method of an ion exchange resin or an ultrafiltration membrane capable of simply and rapidly judging the quality of the ion exchange resin or the ultrafiltration membrane immediately before delivery in a washing factory. SOLUTION: Ultrapure water, from which dissolved oxygen is removed, is supplied to and passed through a column filled with the ion exchange resin being a specimen or an ultrafiltration membrane filter device and column outflow water from the column is supplied to a wafer holder loaded with a wafer to be brought into contact with the wafer and the surface state of the water after contact is measured to judge the quality of the ion exchange resin or the ultrafiltration membrane as the specimen. COPYRIGHT: (C)2008,JPO&INPIT
|
