| 摘要 |
A semiconductor manufacturing apparatus, to prevent breakage and deformation of semiconductor substrates without deteriorating operability in processing. The semiconductor manufacturing apparatus includes a stage on which a semiconductor substrate is placed, and the stage includes a first metal portion made of metal and that comes in contact with the semiconductor substrate placed thereon, and an electroconductive elastic-body portion made of an electroconductive elastic body and that comes in contact with the semiconductor substrate placed thereon. A contaminant is embedded in the electroconductive elastic-body portion.
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